model:PT-T1300D
Diffusion Oxidation Furnace (Research Type)
Application: It is suitable for research and teaching in enterprise R&D, universities and research institutes. It can meet closed-tube dry oxygen oxidation, wet oxygen oxidation, hydrogen oxygen synthesis oxidation, diffusion, annealing at atmospheric pressure, annealing/propulsion, alloying and other processes.
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Detailed Parameters Of The Product
Description:wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
This equipment is a scientific research diffusion oxidation furnace, which is suitable for research and teaching in enterprise R&D, universities and research institutes. It can meet closed-tube dry oxygen oxidation, wet oxygen oxidation, hydrogen oxygen synthesis oxidation, diffusion, annealing at atmospheric pressure, annealing/propulsion, alloying and other processes.
Main Features：wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
●It can meet closed-tube dry oxygen oxidation, wet oxygen oxidation, hydrogen oxygen synthesis oxidation, diffusion, annealing at atmospheric pressure, annealing/propulsion, alloying and other processes.wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
●Using high-reliability industrial control computer + PLC mode, automatic control the furnace temperature, advancing and retreating boat, gas flow and valves, realize the automation of all technological processes;wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
●With strong software functions, equipped with fault self-diagnosis software, which can greatly save maintenance time;wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
●With various of process pipelines, convenient for users to choose;wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
●It has powerful software functions and is equipped with fault self-diagnosis software, which can greatly save maintenance time;wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
●Automatic adjustment of the constant temperature zone, cascade control, can accurately control the actual process temperature of the reaction tube;wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
●With over temperature broken thermocouple, thermocouple short circuit, process gas flow deviation alarm and protection functions;wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
●Products can be customized according to user requirements.wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameters：wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
●Applicable wafer size: 2~8 inch waferwohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
●Working temperature: 600℃～1300℃;wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
●The number of tubes that can be equipped: 1~2 tubes/ setwohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
●Length and accuracy of constant temperature zone: ≤±0.5℃/300~600mm (800℃～1300℃),wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
● Single-point temperature stability: ≤±0.5℃℃ /24h (1100℃);wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
●Temperature ramp capability: the maximum heating rate is 20℃/min, the maximum cooling rate is 5℃/min;wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wohMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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